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Tektronix/Keithley, SMU (Source Measure Unit)

2470

  • Model2470
  • MakerKeithley
  • Description1100V, 1A, 20W SOURCEMETER SMU INSTRUMENT
  • Rental문의요망
  • Stock문의요망
Data Sheet

2470 고전압 소스미터® 소스 측정 장치(SMU)는 첨단 터치, 테스트, 인벤트® 기술을 손쉽게 사용할 수 있도록 지원합니다. 혁신적인 그래픽 사용자 인터페이스(GUI)와 정전식 터치스크린 기술을 결합하여 직관적인 테스트 환경을 구축하고 학습 곡선을 최소화함으로써 엔지니어와 과학자들이 더 빠르게 학습하고, 더 효율적으로 작업하며, 더 쉽게 발명할 수 있도록 돕습니다. 1100V 및 10fA의 측정 용량을 갖춘 2470은 탄화규소(SiC), 질화갈륨(GaN), 파워 MOSFET, 과도 현상 억제 장치, 회로 보호 장치, 전력 모듈, 배터리 등과 같은 고전압, 저누설 소자, 재료 및 모듈의 특성 분석 및 테스트에 최적화되어 있습니다. 이러한 새로운 기능과 고정밀, 고정확도 SMU 장비 개발 분야에서 수십 년간 축적된 키슬리의 전문성이 결합되어 2470은 실험실 및 테스트 환경에서 고전압 소스 및 저전류 측정 애플리케이션을 위한 최고의 선택이 될 것입니다.

Key Features

  • Wide coverage up to 1100 V / 1 A DC 20 W max.
  • 10 fA measure resolution
  • 0.012% basic measure accuracy with 6½-digit resolution
  • Five-inch, high resolution capacitive touch screen GUI
  • Source and sink (4-quadrant) operation
  • SCPI and TSP® scripting programming modes
  • TSP-Link for multi-channel I-V testing
  • Front panel input banana jacks; rear panel high-voltage input triaxial connections
  • Built-in context-sensitive help
  • Front-panel USB 2.0 memory I/O port for transferring data, test scripts, and test configurations

Learn Faster; Work Smarter;Invent Easier

The 2470 features a five-inch, full-color, high resolution touchscreen that supports intuitive operation, helps operators become familiar with the instrument quickly, and optimizes overall speed and productivity. A simple icon-based menu structure reduces the number of steps required to configure a test by as much as 50 percent and eliminates the cumbersome multi-layer menu structures typically used on soft-key instruments. Built-in, contextsensitive help supports intuitive operation and minimizes the need to review a separate manual. These capabilities, combined with the 2470’s high versatility, simplify its operation in both basic and advanced measurement applications, regardless of the user’s previous experience in working with SMU instruments.

All-in-One SMU Instrument

The 2470, Keithley’s fourth generation of SourceMeter SMUs, leverages the proven capabilities of the original 2410 High Voltage SourceMeter SMU Instrument. SMU instruments offer a highly flexible, four-quadrant voltage and current source/load coupled with precision voltage and current measurements. This all-in-one instrument has the capabilities of a:

  • Precision power supply with V and I readback
  • True current source
  • Digital multimeter (DCV, DCI, ohms, and power with 6½-digit resolution)
  • Precision electronic load
  • Trigger controller
Voltage Specifications1, 2,
  Source Measure3
Range4 Resolution Accuracy5 23 °C ± 5 °C,
1 Year ±(% setting + volts)		 Noise (RMS)<10 Hz Resolution Input Resistance Accuracy 23 °C ± 5 °C,
1 Year ±(% reading + volts)
200.0000 mV 5 µV 0.015% + 200 µV 2 µV 100 nV > 10 GΩ 0.012% + 200 µV
2.000000 V 50 µV 0.020% + 300 µV 10 µV 1 µV > 10 GΩ 0.012% + 300 µV
20.00000 V 500 µV 0.015% + 2.4 mV 100 µV 10 µV > 10 GΩ 0.015% + 1 mV
200.0000 V 5 mV 0.015% + 24 mV 1 mV 100 µV > 10 GΩ 0.015% + 10 mV
1000.000 V 50 mV 0.02% + 100 mV 20 mV 10 mV > 10 GΩ 0.015% + 50 mV

Temperature Coefficient 20 V and 1000 V ranges: ± (0.15 × accuracy specification)/°C, 0 °C to 18 °C and 28 °C to 50 °C
200 mV and 2 V ranges: ±(0.30 x accuracy specification)/°C, 0 °C to 18 °C and 28 °C to 50 °C

Current Specifications1, 2
  Source Measure3
Range4 Resolution Accuracy523 °C ± 5 °C,
1 Year ±(% setting + amps)		 Noise (RMS)<10 Hz Resolution Voltage Burden Accuracy23 °C ± 5 °C,
1 Year ±(% reading + amps)
10.00000 nA6 500 fA 0.100% + 200 pA 500 fA 10 fA <100 µV 0.10% + 250 pA
100.0000 nA6 5 pA 0.060% + 250 pA 500 fA 100 fA <100 µV 0.060% + 300 pA
1.000000 μA 50 pA 0.025% + 400 pA 5 pA 1 pA < 100 µV 0.025% + 300 pA
10.00000 μA 500 pA 0.025% + 1.5 nA 40 pA 10 pA <100 µV 0.025% + 700 pA
100.0000 μA 5 nA 0.020% + 15 nA 400 pA 100 pA <100 µV 0.02% + 6 nA
1.000000 mA 50 nA 0.020% + 150 nA 5 nA 1 nA <100 µV 0.02% + 60 nA
10.00000 mA 500 nA 0.020% + 1.5 μA 40 nA 10 nA <100 µV 0.02% + 600 nA
100.0000 mA 5 μA 0.025% + 15 μA 100 nA 100 nA <100 µV 0.025% + 6 μA
1.000000 A 50 μA 0.067% + 900 μA 10 μA 1 μA <100 µV 0.03% + 500 μA

Temperature Coefficient ± (0.15 × accuracy specification)/°C, 0 °C to 18 °C and 28 °C to 50 °C

Notes

1. Speed = 1 PLC.

2. All specifications are guaranteed with output ON.

3. Accuracies apply to 2-wire and 4-wire modes when properly zeroed. For the 200 mV and 1 A ranges, the voltage burden may exceed the specification in 2-wire mode.

4. Maximum display and programming ranges are 5% overrange for voltage, except for the 1000 V range, which is 10% overrange (1100 V), and 5% overrange for current (for example,1.05 A on the 1 A range).

5. For sink mode, 1 µA to 100 mA range, accuracy is ±(0.5% + offset × 3). For 1 A range, accuracy ± (0.15% x accuracy specification))/°C on 20 V and 1000 V ranges ±(1.5% + offset × 3) .

6. Rear-panel triaxial connections only

Resistance Measurement Accuracy (Local Or Remote Sense)7, 8, 9
Range Default Resolution10 Default Test Current Normal Accuracy 23 °C ± 5 °C,
1 Year ± (% reading + ohms)		 Enhanced Accuracy11 23 °C ± 5 °C,
1 Year ± (% reading + ohms)
< 2.000000 Ω12 1 µΩ User-defined Source IACC+ Meas VACC Meas IACC + Meas VACC
20.00000 Ω 10 µΩ 100 mA 0.098% + 0.003 Ω 0.073% + 0.001 Ω
200.0000 Ω 100 µΩ 10 mA 0.077% + 0.03 Ω 0.053% + 0.01 Ω
2.000000 kΩ 1 mΩ 1 mA 0.066% + 0.3 Ω 0.045% + 0.1 Ω
20.00000 kΩ 10 mΩ 100 µA 0.063% + 3 Ω 0.043% + 1 Ω
200.0000 kΩ 100 mΩ 10 µA 0.065% + 30 Ω 0.046% + 10 Ω
2.000000 MΩ 1 Ω 1 µA 0.11% + 300 Ω 0.049% + 100 Ω
20.00000 MΩ 10 Ω 1 µA 0.11% + 1 kΩ 0.052% + 500 Ω
200.0000 MΩ 13 100 Ω 100 nA 0.655% + 10 kΩ 0.349% + 5 kΩ
>200.0000 MΩ12, 13 – User-defined Source IACC+ Meas VACC Meas IACC+ Meas VACC
Temperature Coefficient ± (0.15 × accuracy specification)/°C 0 °C to 18 °C and 28 °C to 50 °C
Source Current, Measure Resistance Mode Total uncertainty = I source accuracy + V measure accuracy (4-wire remote sense)
Source Voltage, Measure Resistance Mode Total uncertainty = V source accuracy + I measure accuracy (4-wire remote sense)
Guard Output Impedance ≥ 300 Ω typical

Notes

7. Speed = 1 PLC.

8. All specifications are guaranteed with output ON.

9. Accuracies apply to 2-wire and 4-wire modes when properly zeroed.

10. Measure resolution 6.5 digits.

11. Source readback enabled; offset compensation on.

12. Source current, measure resistance or source voltage, measure resistance only.

13. Rear-panel triaxial connections only.

Supplemental Specifications
Overrange 105% of range for 200 mV to 200 V, source and measure ranges; 110% of range for 1000 V, source and measure ranges
Regulation  
    Voltage Line: 0.01% of range
Load: 0.01% of range + 100 µV
  
    Current Line: 0.01% of range
Load: 0.01% of range + 100 pA
Source Limits  
    Voltage Source Current Limit Bipolar current limit set with a single value
Minimum value is 10% of range
  
    Current Source Voltage Limit Bipolar voltage limit set with a single value
Minimum value is 10% of range
Voltage Limit/Current Limit Accuracy Add 0.3% of range and ±0.02% of reading to base specification
Overshoot  
    Voltage Source <0.1% typical
Step size = Full scale, resistive load, 20 V range, 10 mA current limit
  
    Current Source <0.1% typical
Step size = Full scale, resistive load of 10 kΩ, 1 mA range, 20 V voltage limit
Range Change Overshoot Overshoot into a fully resistive 100 kΩ load, 10 Hz to 20 MHz bandwidth, adjacent ranges: 250 mV typical
Output Settling Time Time required to reach 0.1% of final value after command is processed and output slew: 20 V range,100 mA current limit: < 200 µs typical
Maximum Slew Rate14 0.2 V/µs, 200 V range, 100 mA limit into a 2 kΩ load (typical)
0.5 V/µs, 1000 V range, 10 mA limit into a 100 kΩ load (typical)
Overvoltage Protection User-selectable values, 10% tolerance; factory default = none
Voltage Source Noise 10 Hz to 20 MHz (RMS): 4 mV typical into a resistive load
Common Mode Voltage 250 V DC
Common Mode Isolation > 1 GΩ, < 1000 pF
Noise Rejection (typical)
NPLC NMRR CMRR
0.01 – 60 dB
0.1 – 60 dB
1 60 dB 100 dB*

* Except lowest two current ranges ~90dB.
Load Impedance  
    Normal Mode 20 nF typical
  
    High-Capacitance Mode Stable into 1 μF typical (specification only valid for ranges ≥100 μA)
Maximum Voltage Drop Between Force and Sense Terminals 5 V
Maximum Sense Lead Resistance 1 MΩ for rated accuracy
Sense Input Impedance > 10 GΩ
Guard Offset Voltage < 300 µV typical

Notes

14. High capacitance mode off.

System Measurement Speeds15

Reading rates (readings per second) typical for 60 Hz (50 Hz), script (TSP) programmed

NPLC Trigger Origin Measure to Memory Measure to GPIB Measure to USB Measure to LAN Source Measure Sweep to Memory Source measure sweep to GPIB Source Measure Sweep to USB Source Measure Sweep to LAN
0.01 Internal 3150 (2800) 2760 (2570) 2825 (2570) 2740 (2530) 1710 (1620) 1620 (1540) 1630 (1540) 1620 (1540)
0.01 External 2170 (2050) 2120 (2003) 2170 (2010) 2100 (1990) 1670 (1590) 1580 (1500) 1590 (1510) 1580 (1510)
0.10 Interna 540 (460) 530 (450) 530 (450) 530 (450) 470 (410) 460 (400) 470 (400) 470 (400)
0.10 External 500 (430) 490 (420) 500 (425) 480 (420) 450 (400) 460 (390) 460 (390) 410 (350)
1.00 Internal 59 (49 58 (49) 59 (49) 59 (49) 58 (48) 58 (48) 58 (48) 57 (48)
1.00 External 58 (48) 57 (48) 58 (48) 58 (48) 57 (48) 57 (48) 57 (48) 55 (48)

Reading rates (readings per second) typical for 60 Hz (50 Hz), SCPI programmed16

NPLC Trigger Origin Measure to Memory Measure to GPIB Measure to USB Measure to LAN Source Measure Sweep to memory Source Measure Sweep to GPIB Source Measure Sweep to USB Source Measure Sweep to LAN
0.01 Internal 3040 (2800) 3000 (2760) 3000 (2760) 3010 (2710) 1710 (1630) 1610 (1544) 1440 (1380) 1690 (1590)
0.01 External 2320 (2165) 2290 (2140) 2340 (2150) 2290 (2130) 1680 (1590) 1560 (1525) 1410 (1360) 1660 (1560)
0.10 Internal 540 (460) 540 (450) 540 (460) 540 (450) 540 (410) 470 (410) 450 (390) 470 (410)
0.10 External 510 (440) 510 (430) 510 (440) 510 (430) 470 (400) 470 (400) 450 (390) 470 (400)
1.00 Internal 59 (49) 59 (49) 59 (49) 59 (49) 58 (48) 58 (48) 57 (48) 58 (48)
1.00 External 58 (49) 58 (49) 58 (49) 58 (49) 58 (49) 58 (48) 57 (47) 58 (48)

Notes

15. Reading rates applicable for voltage or current measurements, autozero off, autorange off, filter off, binary reading format, and source readback off.

16. SCPI programming mode.

General Characteristics (default mode unless specified)

Factory Default Standard Power-Up SCPI Mode
Source Output Modes Fixed DC Level, Memory/Configuration List (mixed function), Stair (linear and log).
Memory Buffer >5,000,000 readings with selected measured values and timestamp.
Real-Time Clock Lithium battery backup (3 yr. + battery life).
Remote Interfaces
GPIB IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology.
USB Device (rear panel, type B) 2.0 Full Speed USBTMC.
USB Host (front panel, type A) USB 2.0, support for flash drives, FAT32.
Ethernet RJ-45 (10/100BT).
Digital I/O Interface:
Lines 6 Input/Output user defined for digital I/O or triggering.
Connector 9-pin female D.
Input Signal Levels 0.7 V (maximum logic low), 3.7 V (minimum logic high).
Input Voltage Limits -0.25 V (Abs. minimum), +5.25 V (Abs. maximum).
Maximum Source Current +2.0 mA @ >2.7 V (per pin).
Maximum Sink Current -50 mA at 0.7 V (per pin, solid-state fuse protected)
5V Power Supply Pin Limited to 500 mA @ >4 V (solid-state fuse protected).
Handler User definable Start of Test, End of Test, 4 category bits.
Programmability SCPI or TSP command sets.
TSP Mode Embedded Test Script Processor (TSP) accessible from any host interface.
IP Configuration Static or DHCP.
Expansion Interface The TSP-Link expansion interface allows TSP enabled instruments to trigger and communicate with each other.
LXI Compliance 1.5 LXI Device Specification 2016.
Display 5 inch capacitive touch, color TFT WVGA (800×480) with LED backlight.
Input Signal Connections Front: Banana. Rear: High-voltage triaxia.
Interlock Active High Input.
Cooling Forced air, variable speed.
Over Temperature Protection Internally sensed temperature overload puts unit in standby mode.
Power Supply 100 V to 240 V RMS, 50–60 Hz (automatically detected at power up).
VA Rating 190 volt-amps max.
Altitude Maximum 2000 meters above sea level.
EMC Conforms to European Union EMC Directive.
Safety NRTL listed to UL61010-1 and UL61010-2-30. Conforms with European Union Low Voltage Directive.
Vibration MIL-PRF-28800F Class 3 Random.
Warm-Up 1 hour to rated accuracies.
Dimensions With bumpers and handle: 106 mm high × 255 mm wide × 425 mm deep (4.18 in × 10.05 in × 16.75 in).
Without bumpers and handle: 88 mm high × 213 mm wide × 403 mm deep (3.46 in × 8.39 in × 15.87 in.)
Weight With bumpers and handle: 4.54 kg (10 lb).
Without bumpers and handle: 4.08 kg (9.0 lb).
Environment Operating: 0 °C to 50 °C, 70% relative humidity up to 35 °C; derate 3% relative humidity/°C, 35 °C to 50 °C.
Storage: -25 °C to 65 °C.
Pollution Category: 2

Ordering Information

2470 1000 V, 1 A, 20 W SourceMeter SMU Instrument

Supplied Accessories

8608 High Performance Test Leads
USB-B-1 USB Cable, Type A to Type B, 1 m (3.3 ft)
CS-1616-3 Safety Interlock Mating Connector
17469460X TSP-Link/Ethernet Cable
  Documentation available at www.tek.com/keithley
  2470 QuickStart Guide
  TSP Toolkit Software (available at www.tek.com)
  LabVIEW and IVI Drivers (available at www.tek.com/keithley)

Available Accessories

Probe
8606 High Performance Modular Probe Kit
Cables, Connectors, Adapters
TRX-1100V-BAN HV Triax to Banana Adapter. Converts the 4 triax connectors on the rear panel to 5 banana jacks
TRX-1100V-* 3-slot HV Low Noise Triax Cable (0.5 m, 1 m, 2 m, 3 m lengths available)
TRX-1100V-CONN 3-Slot HV Male Triax Cable Connector
TRX-1100V-PCBCONN 3-Slot HV Female Triax PC Board Mount Connector
TRX-1100V-FFBARREL 3-Slot 1100 V Triax FemaleE to Female Barrel Interconnect
TRX-1100V-FMFTEE 3-Slot 1100 V Triax Male to Dual Female Tee Adapter
TRX-1100V-FFFTEE 3-Slot 1100 V Triax Female to Dual Female Tee Adapter
TRX-1100V-TBC 3-Slot 1100 V Triax Female Bulkhead Connector
CS-1616-3 Safety Interlock Mating Connector
Communication Interfaces and Cables
7007-1 Shielded GPIB Cable, 1 m (3.3 ft)
KPCI-488LPA IEEE-488 Interface for PCI Bus
KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter
Rack Mount Kits
4299-8 Single Fixed Rack Mount Kit
4299-9 Dual Fixed Rack Mount Kit
Software Options
I-V Tracer Graphical SMU Curve Tracer Software
Kickstart Instrument Control Software

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